Tapping LithiumNiobate DiffractiveOpticalElements vertical_PFM epitaxy NusEce Thermal 3-hexylthiophene dielectric trench IndiumTinOxide ScratchMode Kevlar lift_mode mfm_amplitude Vinylpyridine PolymerPatterns temp_control Al2O3 neodymium_magnets Polyurethane Worcester_Polytechnic_Institute ThermalProperties layers EvatecAG piezoelectric force microscopy ShenYang LiftMode LateralForce Reduction Melt Granada Annealed Foil KevlarFiber PDMS