Patterns DIWafer Croatia IIT-chennai AM-KPFM Korea Chemical_Vapor_Deposition LFM dielectric_trench AtomicLayer biocompatible Tape Worcester_Polytechnic_Institute Hafnium_dioxide CHRYSALIS_INC HardDiskMedia CuSubstrate PolyvinylAcetate Butterfly ThermalProperties Metal-organicComplex TipBiasMode Phase aluminum_nitride Dimethicone molecular_beam UTEM ScanningSpreadingResistanceMicroscopy ItoGlass Melt KAIST Collagen norganic Foil Fujian