biocompatible Lateral vertical_PFM ThermalDetectors semifluorinated alkane flakes Boron Sapphire doped BFO PS_LDPE Monisha EPFL Ni-FeAlloy Calcium semifluorinated_alkanes PatternedSapphireSubstrat Roughness Butterfly Fluoride Metal ForceMapping LiNbO3 Molybdenum Platinum SmalScan Cobalt-dopedIronOxide Melt MLCC IISCBangalore YttriaStabilizedZirconia Kevlar Stiffness SSRM Carbon